The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
May. 21, 2004
Oleg P. Kishkovich, Greenville, RI (US);
Devon Kinkead, Holliston, MA (US);
Anatoly Grayfer, Newton, MA (US);
William M. Goodwin, Medway, MA (US);
David Ruede, Northbridge, MA (US);
Oleg P. Kishkovich, Greenville, RI (US);
Devon Kinkead, Holliston, MA (US);
Anatoly Grayfer, Newton, MA (US);
William M. Goodwin, Medway, MA (US);
David Ruede, Northbridge, MA (US);
Mykrolis Corporation, Billerica, MA (US);
Abstract
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.