The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Nov. 18, 2002
Anthony Dicarlo, Richardson, TX (US);
Patrick I. Oden, McKinney, TX (US);
Richard L. Knipe, McKinney, TX (US);
Rabah Mezenner, Richardson, TX (US);
James D. Huffman, Cambridge, GB;
Anthony DiCarlo, Richardson, TX (US);
Patrick I. Oden, McKinney, TX (US);
Richard L. Knipe, McKinney, TX (US);
Rabah Mezenner, Richardson, TX (US);
James D. Huffman, Cambridge, GB;
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.