The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Jul. 02, 2004
Applicants:
Jens Peter Krog, Ulstrup, DK;
Casper Pedersen, Koobenhavn, DK;
Carsten Christensen, Bagsvaerd, DK;
Inventors:
Assignee:
Grundfos a/s, B{umlaut over (j)}rringbro, DK;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
The differential pressure sensor is formed of a semiconductor substrate () which is thinned out in an inner region into a membrane () which may be impinged by pressure on both sides. Measurement resistances (to) for detecting the differential pressure (Pminus P) are formed within the membrane (), and compensation resistances () are formed on the carrier, which are connected to measurement resistances (). The measurement resistances () are connected into a first measurement bridge () and the compensation resistances (to) into a second measurement bridge ().