The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2006

Filed:

Jul. 28, 2004
Applicants:

Nobuo Ozawa, Tokyo, JP;

Takasumi Kobayashi, Tokyo, JP;

Inventors:

Nobuo Ozawa, Tokyo, JP;

Takasumi Kobayashi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/00 (2006.01); G01P 15/00 (2006.01); G01P 15/125 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

There is provided a compact, high-sensitivity acceleration sensor. The acceleration sensor includes a weight, a pedestalarranged around the periphery of the weight, a support frameformed to have a width narrower than the width of the pedestalall around its perimeter, a massattached to the weightto retain the weightinside the support frame, beamsconnecting the support frameand the massand overlapping the pedestalnear their ends on the side of the support frame, and a peripheral interlayerarranged between the support frameand the pedestalto create a predetermined clearance between the pedestaland the parts of the beamsthat overlap the pedestal


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