The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2006
Filed:
Dec. 12, 2002
Keiichi Akagawa, Kamakura, JP;
Yoshihiko Suzuki, Funabashi, JP;
Tohru Ishizuya, Tokyo, JP;
Junji Suzuki, Hachioji, JP;
Katsuhiko Kurumada, Kanagawa, JP;
Masatoshi Kanaya, Kanagawa-ken, JP;
Toshiaki Tamamura, Kanagawa, JP;
Keiichi Akagawa, Kamakura, JP;
Yoshihiko Suzuki, Funabashi, JP;
Tohru Ishizuya, Tokyo, JP;
Junji Suzuki, Hachioji, JP;
Katsuhiko Kurumada, Kanagawa, JP;
Masatoshi Kanaya, Kanagawa-ken, JP;
Toshiaki Tamamura, Kanagawa, JP;
Nikon Corporation, Tokyo, JP;
NTT Electronics Corporation, Tokyo, JP;
Abstract
The light guide substratehas mirror receiving groovesand light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrorswith respect to the grooves. The actuator substratehas mirrorsand actuators which place the mirrorsin a state in which the mirrors are drawn in toward the substrate, or a state in which the mirrors protrude from the substrate. The light guide substrateand actuator substrateare aligned using alignment marks and joined with a spacerinterposed so that the mirrorsretract from the grooveswhen the mirrorsare drawn in toward the substrate, and so that the mirrorsadvance into the grooveswhen the mirrorsprotrude from the substrate. This alignment is performed in a state in which all of the mirrorsare drawn in toward the substrate