Thin film capacitor, thin film capacitor array and electronic component

Abstract

A thin film capacitor with small electrode resistance and great Q-value which comprises a small number of thin films that are deposited successively is disclosed. It is effective for miniaturization and high density packaging of a device and for preventing poor characteristics and degradation of reliability. A plurality of lower electrodesare provided on a supporting substrate, which are spaced apart from each other in a high frequency signal propagation direction P. Two upper electrodesspaced apart from each other in the high frequency signal propagation direction P are provided on one of the plurality of the lower electrodesthrough a thin film dielectric layer, by which two capacitance elements are formed. The upper electrodesare connected together by an extraction electrodeso that the two capacitance elements are connected in series. A maximum distance Lbetween the two upper electrodesin the high frequency signal propagation direction P is smaller than a minimum length Wof the upper electrodesin the direction perpendicular to the high frequency signal propagation direction P in plan view.