The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2006

Filed:

Mar. 03, 2003
Applicants:

George G. Barclay, Jefferson, MA (US);

Subbareddy Kanagasabapathy, Worcester, MA (US);

Matthew A. King, Boston, MA (US);

Inventors:

George G. Barclay, Jefferson, MA (US);

Subbareddy Kanagasabapathy, Worcester, MA (US);

Matthew A. King, Boston, MA (US);

Assignee:

Shipley Company, L.L.C., Marlborough, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

New methods are provided for synthesis of polysiloxanes (silsesquioxanes) and photoresists comprising same. Synthetic methods of the invention include use of a polymerization templating reagent that has multiple reactive nitrogen groups, particularly a diamine reagent.


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