The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2006
Filed:
Apr. 17, 2003
Wendell Blonigan, Union City, CA (US);
Emanuel Beer, San Jose, CA (US);
Dongchoon Suh, Santa Clara, CA (US);
Jaime Munoz, Los Gatos, CA (US);
Sam H. Kim, Fremont, CA (US);
Wendell Blonigan, Union City, CA (US);
Emanuel Beer, San Jose, CA (US);
Dongchoon Suh, Santa Clara, CA (US);
Jaime Munoz, Los Gatos, CA (US);
Sam H. Kim, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve isolates from each other. The slit valve door actuator assembly includes an actuator which moves the slit valve door between open and closed positions, and a locking mechanism to keep the slit valve door in a position to seal the slit valve in resistance to high gas pressure against the slit valve door. The locking mechanism may include a hard stop which is selectively movable into position to block retracting movement of the slit valve door.