The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2006

Filed:

Mar. 23, 2004
Applicants:

Minekazu Sakai, Kariya, JP;

Takashi Katsumata, Kariya, JP;

Inventors:

Minekazu Sakai, Kariya, JP;

Takashi Katsumata, Kariya, JP;

Assignee:

Denso Corporation, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/10 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a semiconductor dynamic quantity sensor, a mass serving as a weight portion for detecting application of a dynamic quantity is divided into three masses () in series. The masses () thus divided are connected to one another by connecting beams (CB, CB, CB, CB). The masses () located at both the end portions are supported through beams (B, B, B, B) by a semiconductor substrate () so as to be allowed to be displaced in the direction orthogonal to the connection direction of the masses. The center mass () connected to the masses () through the connecting beams (CB, CB, CB, CB) is allowed to be displaced only in the connecting direction of the masses by the connecting beams (CB, CB, CB, CB).


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