The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2006

Filed:

Sep. 29, 2004
Applicants:

Juan Jose Gonzalez, Fort Collins, CO (US);

Steven J. Geissler, Fort Collins, CO (US);

Fernando Gustavo Tomasel, Fort Collins, CO (US);

Inventors:

Juan Jose Gonzalez, Fort Collins, CO (US);

Steven J. Geissler, Fort Collins, CO (US);

Fernando Gustavo Tomasel, Fort Collins, CO (US);

Assignee:

Advanced Energy Industries, Inc., Fort Collins, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus is described. The apparatus includes a vacuum chamber and an electrical transformer to induce an electromagnetic field within the vacuum chamber. The transformer includes a primary winding, a secondary winding formed by the plasma loop, and a separate secondary winding implemented to measure the voltage along the plasma loop. The apparatus also includes a current transformer to measure the current flow through the plasma loop.


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