The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Mar. 05, 2003
Masahiro Hayashi, Sakata, JP;
Masahiro Hayashi, Sakata, JP;
Seiko Epson Corporation, , JP;
Abstract
A method is provided for manufacturing a semiconductor device that can reduce the number of steps in manufacturing a triple-well that includes multiple ion implantation steps and heat treatment steps. The method comprises the steps of: (a) forming a first mask layer having a first opening section on a semiconductor substrate; (b) forming a first dielectric layer on an exposed surface of the semiconductor substrate in the first opening section; (c) forming an impurity layer by introducing a first impurity of a second conductivity type in the semiconductor substrate through the first dielectric layer; (d) conducting a heat treatment to form a first well, and a second dielectric layer on the exposed surface of the semiconductor substrate in the first opening section; (e) forming a second mask layer having a second opening section on the first mask layer; and (f) forming a second well within the first well by introducing a second impurity of the first conductivity type in the semiconductor substrate through the second dielectric layer.