The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Apr. 29, 2003
Andrew C. Mcneil, Scottsdale, AZ (US);
Gary LI, Gilbert, AZ (US);
Gary J. O'brien, Gilbert, AZ (US);
Andrew C. McNeil, Scottsdale, AZ (US);
Gary Li, Gilbert, AZ (US);
Gary J. O'Brien, Gilbert, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A proof mass () for a MEMS device is provided herein. The proof mass comprises a base () comprising a semiconductor material, and at least one appendage () adjoined to said base by way of a stem (). The appendage () comprises a metal () or other such material that may be disposed on a semiconductor material (). The metal increases the total mass of the proof mass () as compared to a proof mass of similar dimensions made solely from semiconductor materials, without increasing the size of the proof mass. At the same time, the attachment of the appendage () by way of a stem () prevents stresses arising from CTE differentials in the appendage from being transmitted to the base, where they could contribute to temperature errors.