The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Sep. 25, 2002
Applicant:
Hiroshi Imamura, Suita, JP;
Inventor:
Hiroshi Imamura, Suita, JP;
Assignee:
Kanken Techno Co., Ltd., Suita, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/68 (2006.01); B01D 53/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of removing harmful components of a perfluorocarbon gas or a perfluorocompound including the step of mixing at least one of a hydrocarbon gas and NHgas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment. The method also includes the step of thermally decomposing the resulting mixed gas in a non-oxidizing atmosphere.