The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2006

Filed:

Apr. 24, 2003
Applicants:

Junri Ishikura, Tokyo, JP;

Makoto Kameyama, Chiba, JP;

Yasuyuki Saito, Kanagawa, JP;

Inventors:

Junri Ishikura, Tokyo, JP;

Makoto Kameyama, Chiba, JP;

Yasuyuki Saito, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A particle film deposition apparatus and method are provided, with which ultra fine particles are generated by arc heating. The generated ultra fine particles can be efficiently sucked up into a transfer tube regardless of an arc voltage, and the resulting film can be stable in shape. An evaporation materialto be evaporated by arc heating and to generate ultra fine particles is connected to an electrode. As other electrodes, a plurality of rodseach having a discharge section at the tip thereof are provided. These rodsare so arranged as to be directed in each different direction with respect to the evaporation material


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