The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Sep. 04, 2003
Eric Bergman, Kalispell, MT (US);
Dana Scranton, Kalispell, MT (US);
Erik Lund, Tukwila, WA (US);
Worm Lund, Tukwila, WA (US);
Eric Bergman, Kalispell, MT (US);
Dana Scranton, Kalispell, MT (US);
Erik Lund, Tukwila, WA (US);
Worm Lund, Tukwila, WA (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.