The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Apr. 18, 2002
Tohru Ishizuya, Tokyo, JP;
Keiichi Akagawa, Kamakura, JP;
Tohru Ishizuya, Tokyo, JP;
Keiichi Akagawa, Kamakura, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The mirror device has a mirror, and a supporting mechanism which elastically supports the mirroron a substratein a state in which the mirror floats from the substrate, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting partsA,B andC that mechanically connect the substrateand mirror. Each of the supporting partsA,B andC has one or more plate spring partsthat are constructed from a thin film consisting of one or more layers. One end portion of each plate spring partis connected to the substratevia a leg partwhich has a rising part that rises from the substrate. The other end portion of the plate spring partis mechanically connected to the mirrorvia a connecting part which has a rising part that rises from this other end portion. The mirroris supported on the substrateonly via the plate spring partof the respectiveA,B andC. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile