The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Aug. 23, 2000
Applicants:
John P Gillham, Malvern, GB;
Rex Watton, Malvern, GB;
John C Alderman, Cork, IE;
Inventors:
Assignee:
Qinetiq Limited, Hants, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a micro-bridge device () onto a substrate (). The method includes the steps of: providing a sacrificial material () on a surface region of the substrate (); patternwise etching the sacrificial material (); providing a sensing material () on a surface region of the sacrificial material; providing a support material () on a surface region of the sensing material; and removing the sacrificial material () leaving support material () with the sensing material () on its lower surface, substantially free standing above the substrate ().