The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Jul. 16, 2004
Satoshi Yamaguchi, Toyonaka, JP;
Makoto Akita, Kusatsu, JP;
Isao Yoshida, Ikeda, JP;
Sumitomo Chemical Company, Limited, Osaka, JP;
Abstract
A sulfonate of the formula (I):wherein Q, Q, Q, Qand Qeach independently represents a certain substituent, and Arepresents a counter ion,with the proviso that at least one of Q, Q, Q, Qand Qis a group of the formula (II)wherein Rand Reach independently an alkyl having 1 to 12 carbon atoms or the like; anda chemical amplification type positive resist composition comprising the sulfate of the formula (I) anda resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid.