The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7000664 B1

PDF
Full Text
Expired
Date of Patent:
Feb. 21, 2006

Filed:

Dec. 21, 2001
Applicant:

Yuzuru Kondoh, Hyogo, JP;

Inventor:

Yuzuru Kondoh, Hyogo, JP;

Assignee:

Kaneka Corporation, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/048 (2006.01); H01L 25/00 (2006.01); B23P 21/00 (2006.01); B23P 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A sheet supply section disposed along a transport way of a substrate feeds a sheet wound in a roll shape. A sheet cutting section cuts a sealing sheet to be set on the substrate from a fed portion of the sheet. A sheet set section including a transfer head of a vacuum suction type with a plurality of suction holes disposed therein reciprocates/moves the transfer head over a sheet receiving position in the sheet cutting section and a sheet covering position in the transport way. The sheet set section lowers the transfer head in the sheet receiving position, raises the transfer head at the sheet covering position. The transfer head attracts the sheet at the sheet-receiving position and does not attract the sheet at the sheet covering position the sheet covers the substrate.


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