The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
May. 14, 2004
Applicants:
James H. Rogers, Santa Clara County, CA (US);
Brian Hoffman, Deschutes County, OR (US);
Inventors:
James H. Rogers, Santa Clara County, CA (US);
Brian Hoffman, Deschutes County, OR (US);
Assignee:
Intevac, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25D 23/12 (2006.01); F28F 7/00 (2006.01); F28F 5/00 (2006.01); C23C 16/00 (2006.01); C23C 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Described is a cooling system for use in the manufacture of substrates into magnetic disk memory in which cooling plates are positioned dynamically in relation to a substrate to be cooled. This enables positioning the cooling plates closer for more effective cooling. Positioning is controlled by capacitive measurements between the cooling plates and the substrate to be cooled.