The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Apr. 20, 2004
James D. Cook, Freeport, IL (US);
Cornel P. Cobianu, Bucharest, RO;
Vlad Buiculescu, Bucharest, RO;
Ioan Pavelescu, Bucharest, RO;
Brian D. Speldrich, Freeport, IL (US);
James Z. Liu, Rockford, IL (US);
Brian J. Marsh, Freeport, IL (US);
James D. Cook, Freeport, IL (US);
Cornel P. Cobianu, Bucharest, RO;
Vlad Buiculescu, Bucharest, RO;
Ioan Pavelescu, Bucharest, RO;
Brian D. Speldrich, Freeport, IL (US);
James Z. Liu, Rockford, IL (US);
Brian J. Marsh, Freeport, IL (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.