The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Jun. 05, 2003
Vladimir A. Aksyuk, Piscataway, NJ (US);
Omar D. Lopez, Summit, NJ (US);
Flavio Pardo, New Providence, NJ (US);
Maria E. Simon, New Providence, NJ (US);
Vladimir A. Aksyuk, Piscataway, NJ (US);
Omar D. Lopez, Summit, NJ (US);
Flavio Pardo, New Providence, NJ (US);
Maria E. Simon, New Providence, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mmto about +2 mm.