The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Nov. 04, 2004
Kazuyuki Takegawa, Ichinomiya, JP;
Ryoji Matsui, Anpachi-cho, JP;
Tetsuya Yamada, Gifu, JP;
Tsutomu Imai, Anpachi-cho, JP;
Seiji Kai, Anpachi-cho, JP;
Yuko Tanaka, Anjo, JP;
Kazuyuki Takegawa, Ichinomiya, JP;
Ryoji Matsui, Anpachi-cho, JP;
Tetsuya Yamada, Gifu, JP;
Tsutomu Imai, Anpachi-cho, JP;
Seiji Kai, Anpachi-cho, JP;
Yuko Tanaka, Anjo, JP;
Sanyo Electric Co., Ltd., Moriguchi, JP;
Abstract
The present invention intends to provide a manufacturing method of a heat resistant micro-lens. The manufacturing method includes forming on a substrate an inorganic film having the optical transparency; forming, at positions that are on the inorganic film and correspond to lens formation positions, a resist films; etching a portion where the resist films are not formed of the inorganic film; removing the resist films that remain; and irradiating inert gas ions to the inorganic film from which the resist films are removed and that is patterned according to the etching.