The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Jun. 30, 2003
Michael T. Bruhns, Pittsboro, NC (US);
Brad Williams, Cary, NC (US);
Jeff Lahaye, Cary, NC (US);
Peter Andrews, Durham, NC (US);
Michael T. Bruhns, Pittsboro, NC (US);
Brad Williams, Cary, NC (US);
Jeff LaHaye, Cary, NC (US);
Peter Andrews, Durham, NC (US);
Cree, Inc., Durham, NC (US);
Abstract
A method is provided for forming semiconductor devices using a semiconductor substrate having first and second opposed sides, and at least one device layer on the second side of the substrate, the at least one device layer including first and second device portions. A first trench is formed in the first side of the substrate between the first and second device portions. A second trench is formed in the second side of the substrate between the first and second device portions.