The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Nov. 24, 2003
Applicant:
Ken Matsumoto, Tochigi, JP;
Inventor:
Ken Matsumoto, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65G 21/677 (2006.01); G03F 1/00 (2006.01); G03B 27/52 (2006.01); G03B 27/62 (2006.01);
U.S. Cl.
CPC ...
Abstract
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a pair of fork positions or a reticle hand. Inert gas is injected and supplied from the injectors into a pellicle space through vent holes of a reticle with a pellicle. In this state, the reticle with the pellicle is transported.