The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
Nov. 13, 2001
Roger A. Robbins, McKinney, TX (US);
Jwei Wien Liu, Plano, TX (US);
Jack C. Smith, Parker, TX (US);
Edward Carl Fisher, Lucas, TX (US);
Joyce Wong Holton, Plano, TX (US);
Roger A. Robbins, McKinney, TX (US);
Jwei Wien Liu, Plano, TX (US);
Jack C. Smith, Parker, TX (US);
Edward Carl Fisher, Lucas, TX (US);
Joyce Wong Holton, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An anchor to hold getter materials in place within a micromechanical device package substrate. First and second cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. The getter anchor may be formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion—formed in the middle layer and a relatively narrower top portion—formed by the top layer. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity.