The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6992306 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 31, 2006

Filed:

Apr. 14, 2004
Applicants:

Masanori Honda, Tochigi, JP;

Yoshiki Kino, Tochigi, JP;

Inventors:

Masanori Honda, Tochigi, JP;

Yoshiki Kino, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A temperature adjustment apparatus for adjusting the temperature of an optical member includes a first radiation mechanism, with a first radiation member, that transfers the radiation heat between a predetermined area of the optical member and for adjusting the temperature of the optical member by the first radiation member; and a shielding member for reducing radiation heat transferred to an area other than the determined area among the radiation heat from the first radiation member.


Find Patent Forward Citations

Honda, Masanori. (2006). Temperature adjustment apparatus, exposure apparatus having the same, and device fabricating method (U.S. Patent No. 6992306). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6992306

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