The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
Aug. 23, 2004
Applicants:
Dong-woo Lee, Seoul, KR;
Jin-sung Lee, Seoul, KR;
Sang-kap Kim, Osan-si, KR;
Dong-hwa Shin, Suwon-si, KR;
Tae-gyu Kim, Gyeonggi-do, KR;
Inventors:
Dong-Woo Lee, Seoul, KR;
Jin-Sung Lee, Seoul, KR;
Sang-Kap Kim, Osan-si, KR;
Dong-Hwa Shin, Suwon-si, KR;
Tae-Gyu Kim, Gyeonggi-do, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wafer bake system includes a heating plate for heating a wafer, and means for supporting the wafer to be spaced from the heating plate, wherein a gap distribution between the wafer and the heating plate is measured, and a temperature gradient of the wafer is controlled based on the measured gap distribution.
Lee, Dong-Woo. (2006). Wafer bake system and method for operating the same (U.S. Patent No. 6992270). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6992270
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