The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2006
Filed:
Aug. 24, 2001
Jonathan Bernstein, Medfield, MA (US);
William P. Taylor, North Andover, MA (US);
Gregory A. Kirkos, Somerville, MA (US);
Marc Waelti, East Hampstead, NH (US);
Jonathan Bernstein, Medfield, MA (US);
William P. Taylor, North Andover, MA (US);
Gregory A. Kirkos, Somerville, MA (US);
Marc Waelti, East Hampstead, NH (US);
Corning Incorporated, Corning, NY (US);
Abstract
An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.