The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2006
Filed:
Jun. 08, 2004
Kotaro Akutsu, Soka, JP;
Kotaro Akutsu, Soka, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes an X driving member () being movable along an X direction, a Y driving member () being movable along a Y direction, an X-Y movable member being movable in the Y direction relative to the X driving member, through a Y lateral static-pressure bearing (), and also being movable in the X direction relative to the Y driving member through an X lateral static-pressure bearing, wherein a fluid discharged from the X lateral static-pressure bearing is combined with a fluid discharged from the Y lateral static-pressure bearing, and wherein the combined fluid is discharged from a discharging bore (″) formed in the X driving member.