The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2006
Filed:
May. 28, 2003
Applicants:
Timothy Weidman, Sunnyvale, CA (US);
William R. Livesay, San Diego, CA (US);
Matthew F. Ross, San Diego, CA (US);
Inventors:
Timothy Weidman, Sunnyvale, CA (US);
William R. Livesay, San Diego, CA (US);
Matthew F. Ross, San Diego, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); G03F 7/027 (2006.01); G03F 7/039 (2006.01); G03F 7/40 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
Abstract
One embodiment of the present invention is a photoresist formulation that includes e-beam cross-linkable substituents, which substituents include one or more of the following functional groups: (a) carbon-carbon double bonds; (b) a strained ring system; (c) a halogenated compound; and (d) one or more organo-silicon moieties.