The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Aug. 02, 2004
Applicant:
Yee-chung Fu, Fremont, CA (US);
Inventor:
Yee-Chung Fu, Fremont, CA (US);
Assignee:
Advanced Nano Systems, Inc., San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/182 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to a rotating frame by a first torsional hinge along a rotational axis. The rotating frame has a body that defines a frame opening, and a group of rotational teeth extending from the body. A first bonding pad is located in the frame opening and coupled to the rotating frame by a second torsional hinge along the rotational axis. A second bonding pad is coupled to the rotating frame by a third torsional hinge along the rotational axis.