Reflective liquid crystal display device

Abstract

A reflective liquid crystal display device has at least one anti-reflection layer made of a metallic film and a silicon oxynitride film that exhibits low reflectivity against light beams which may otherwise be incident into pixel switching transistors. At least one pair of pixel switching transistor and a capacitor are formed on a semiconductor substrate. The transistor and the capacitor are electrically isolated from each other. A first interlayer insulating layer is formed on the transistor and the capacitor. A wiring layer is formed on the first interlayer insulating layer. A second interlayer insulating layer is formed over the wiring layer. A light shielding layer is formed on the second interlayer insulating layer. A third interlayer insulating layer is formed over the light shielding layer. At least one pixel electrode is formed on the third interlayer insulating layer. A common electrode is formed over the pixel electrode. A light-transmissive substrate is formed on the common electrode. A liquid crystal layer is provided between the pixel electrode and the common electrode. An anti-reflection layer is formed on, at least, either the wiring layer or the light shielding layer. The anti-reflection layer is a double layer of a metallic film and a silicon oxynitride film that exhibits a refraction index different from a refraction index of the third interlayer insulating layer.