The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Jun. 17, 2002
Applicants:
Jae Chang Jung, Ichon-shi, KR;
Keun Kyu Kong, Kwangju, KR;
Hyeong Soo Kim, Ichon-shi, KR;
Jin Soo Kim, Taejon-shi, KR;
Cha Won Koh, Seoul, KR;
Sung Eun Hong, Sungnam-shi, KR;
Geun Su Lee, Ichon-shi, KR;
Min Ho Jung, Ichon-shi, KR;
Ki Ho Baik, Ichon-shi, KR;
Inventors:
Jae Chang Jung, Ichon-shi, KR;
Keun Kyu Kong, Kwangju, KR;
Hyeong Soo Kim, Ichon-shi, KR;
Jin Soo Kim, Taejon-shi, KR;
Cha Won Koh, Seoul, KR;
Sung Eun Hong, Sungnam-shi, KR;
Geun Su Lee, Ichon-shi, KR;
Min Ho Jung, Ichon-shi, KR;
Ki Ho Baik, Ichon-shi, KR;
Assignee:
Hynix Semiconductor Inc., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/09 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides an over-coating composition comprising a basic compound for coating a photoresist composition to provide a vertical photoresist pattern.