The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Nov. 06, 2002
Hideo Takino, Setagaya, JP;
Hideo Takino, Setagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A multifaceted reflecting mirror is provided with a plurality of reflecting mirror elementsand a base platefor magnet, each of the plurality of reflecting mirror elementscomprising a reflecting surfaceand a magnetic filmformed on a bottom surface. The respective reflecting mirror elementscan be positioned highly accurately on the base plateby using a positioning guide. The maintenance operation is easily performed as well, because the respective reflecting mirror elementsare detachable. When the multifaceted reflecting mirror is used in combination with another multifaceted reflecting mirror for an illumination optical system of a reflection type exposure apparatus which uses, as an exposure light beam, a light beam having a short wavelength such as soft X-ray, it is possible to illuminate an exposure area on a substrate with the light beam having an extremely uniform illumination intensity.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile