The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Dec. 10, 2003
Takao Iwaki, Obu, JP;
Hiroyuki Wado, Toyota, JP;
Toshimasa Yamamoto, Tokyo, JP;
Kiyokazu Isomura, Kariya, JP;
Tomoyuki Mizutani, Nisshin, JP;
Akihiko Teshigahara, Nisshin, JP;
Ryuuichirou Abe, Ichinomiya, JP;
Takao Iwaki, Obu, JP;
Hiroyuki Wado, Toyota, JP;
Toshimasa Yamamoto, Tokyo, JP;
Kiyokazu Isomura, Kariya, JP;
Tomoyuki Mizutani, Nisshin, JP;
Akihiko Teshigahara, Nisshin, JP;
Ryuuichirou Abe, Ichinomiya, JP;
DENSO Corporation, Kariya, JP;
Abstract
A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of semiconductor. This flow sensor has high sensor sensitivity with low energy consumption. Further, the sensor has high detection accuracy, and the thin film portion has high endurance. Furthermore, the flow sensor with a passivation film has appropriate thickness so as to improve strength of a thin film portion.