The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Sep. 24, 2004
Yuuichi Mikata, Yokohama, JP;
Yuuichi Mikata, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
An availability evaluation system of a semiconductor manufacturing line, comprising a unit configured to calculate an incidence probability Xi (i=1 to k) in combination by applying a tool operation probability and a tool stoppage probability to all combinations 'k' in which at least a line fabrication availability is not zero, of the combinations of operation and stoppage of tools, and by obtaining a product of the probabilities of all the tools, and a unit configured to, when a product between the incidence probability Xi of a combination and a fabrication availability Yi of the combination is defined as a probability converted fabrication availability with respect to each of the combinations, calculate an availability value of Q=ΣX×Y/F obtained by dividing a sum of probability converted fabrication availabilities of the combinations by a fabrication availability F at a 100% availability.