The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Dec. 03, 2003
Applicants:
James J. Xie, Fremont, CA (US);
Minh V. Ngo, Fremont, CA (US);
Sergey D. Lopatin, Santa Clara, CA (US);
Inventors:
James J. Xie, Fremont, CA (US);
Minh V. Ngo, Fremont, CA (US);
Sergey D. Lopatin, Santa Clara, CA (US);
Assignee:
Advanced Micro Devices, Inc, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
Systems and methods are disclosed for creating smooth surfaces for layers that are employed in memory cells and have previously been subject to a CMP process. The present invention employs various cycles of exposing the post CMP surface to inorganic and organic acids, as well as growing passive layers. The systems and methods may comprise an electroless feature for forming the passive layers.