The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Dec. 23, 2002
Applicants:
Brian C. Lacourse, Pepperell, MA (US);
Morteza Zandi, Shrewsbury, MA (US);
Ara Vartabedian, Hudson, MA (US);
Inventors:
Brian C. LaCourse, Pepperell, MA (US);
Morteza Zandi, Shrewsbury, MA (US);
Ara Vartabedian, Hudson, MA (US);
Assignee:
Saint-Gobain Ceramics & Plastics, Inc., Worcester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C05B 35/00 (2006.01); B32B 18/00 (2006.01); B23B 5/22 (2006.01); B23B 31/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ/ρless than about 5. In this regard, ρrepresents the resistivity of the electrostatic chuck at 10 applied volts while ρrepresents the resistivity of the AlN material at 500 applied volts.