The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
May. 09, 2003
Koji Seki, Tokyo, JP;
Nobuhiko Zushi, Tokyo, JP;
Shinichi Ike, Tokyo, JP;
Seishi Nakano, Tokyo, JP;
Tarou Nakata, Tokyo, JP;
Shoji Kamiunten, Tokyo, JP;
Koji Seki, Tokyo, JP;
Nobuhiko Zushi, Tokyo, JP;
Shinichi Ike, Tokyo, JP;
Seishi Nakano, Tokyo, JP;
Tarou Nakata, Tokyo, JP;
Shoji Kamiunten, Tokyo, JP;
Yamatake Corporation, Tokyo, JP;
Abstract
A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.