The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Sep. 02, 2003
Applicants:
Chih-chang Tsai, Kaohsiung, TW;
Ming-hsun Yang, Hsinchu, TW;
Inventors:
Chih-Chang Tsai, Kaohsiung, TW;
Ming-Hsun Yang, Hsinchu, TW;
Assignee:
Nanodynamics Inc., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A piezoelectric ink jet print head and a fabrication method for a pressure chamber thereof. A silicon substrate has at least one large-size opening. A photoresist layer is formed in the large-size opening of the silicon substrate and has a plurality of small-size trenches spaced apart from each other. Each of the small-size trenches serves as a pressure chamber. An adhesion layer is formed overlying the silicon substrate to cover the photoresist layer and the small-size trenches. A silicon layer is formed overlying the adhesion layer to serve as a vibrating layer.