The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2005

Filed:

Sep. 20, 2001
Applicants:

Kang-ho Ahn, Seoul, KR;

Sang-soo Kim, Seoul, KR;

Hae-young Jeong, Taejon, KR;

Inventors:

Kang-Ho Ahn, Seoul, KR;

Sang-Soo Kim, Seoul, KR;

Hae-Young Jeong, Taejon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N001/00 ;
U.S. Cl.
CPC ...
Abstract

A condensation particle counter measures the number of ultra-fine particles by growing the ultra-fine particles through a condensing process. The counter includes a capillary in which vapor of operating liquid is condensed and the ultra-fine particles grow. An insulating material surrounds the capillary to shut out heat flow between the capillary and the environment. The condensation particle counter can use various operating liquids including alcohol and water, and can be also applied to semiconductor clean rooms.


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