The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Dec. 09, 2003
Naomasa Suzuki, Hitachinaka, JP;
Toshiro Kubo, Hitachinaka, JP;
Noriaki Arai, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Hideo Todokoro, Hinode-machi, JP;
Yoichi Ose, Mito, JP;
Naomasa Suzuki, Hitachinaka, JP;
Toshiro Kubo, Hitachinaka, JP;
Noriaki Arai, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Hideo Todokoro, Hinode-machi, JP;
Yoichi Ose, Mito, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electronsemitted in a direction at a small angle with the surface of the sampleare detected by the detectorsandarranged on the side of the electron sourceof the magnetic field leakage type object lensand a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile