The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Oct. 10, 2003
Eric L. Nikkel, Philomath, OR (US);
Stephen J Potochnik, Corvallis, OR (US);
Charles C Haluzak, Corvallis, OR (US);
Chien-hua Chen, Corvallis, OR (US);
Mickey Szepesi, Salem, OR (US);
Eric L. Nikkel, Philomath, OR (US);
Stephen J Potochnik, Corvallis, OR (US);
Charles C Haluzak, Corvallis, OR (US);
Chien-Hua Chen, Corvallis, OR (US);
Mickey Szepesi, Salem, OR (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A microelectromechanical system (MEMS) device is created by forming mechanical structures supported by a substrate having a bond ring area laterally spaced from the mechanical structures and having a sacrificial layer surrounding the mechanical structures. A bond ring material is formed on top of the sacrificial layer and the bond ring area. Some of the bond ring material is then removed to create a bond ring.