The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Mar. 20, 2003
Applicants:
Kazuaki Yamaguchi, Ama, JP;
Yoshinobu Goto, Nagoya, JP;
Inventors:
Kazuaki Yamaguchi, Ama, JP;
Yoshinobu Goto, Nagoya, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/00 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract
A supporting structure of a ceramic susceptor is provided, including a ceramic susceptor to be heated having a mounting face and a back face, and a ceramic supporting member joined with the back face of the susceptor. The supporting member has an outer wall surface, and a continuous and integral curved part formed between the outer wall surface and the back face of the susceptor. The curved part has a radius of curvature 'R' in a range of 4 mm to 25 mm in the longitudinal direction of the supporting member, and a minimum wall thickness 't' in a range of 1 mm to 15 mm.