The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Feb. 07, 2003
Burgess R. Johnson, Bloomington, MN (US);
Max C. Glenn, Chanhassen, MN (US);
William P. Platt, Columbia Heights, MN (US);
David K. Arch, Bloomington, MN (US);
Mark W. Weber, Zimmerman, MN (US);
Burgess R. Johnson, Bloomington, MN (US);
Max C. Glenn, Chanhassen, MN (US);
William P. Platt, Columbia Heights, MN (US);
David K. Arch, Bloomington, MN (US);
Mark W. Weber, Zimmerman, MN (US);
Honeywell International, Inc., Morristown, NJ (US);
Abstract
A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.