The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2005

Filed:

Sep. 28, 1999
Applicant:

Frederic Zenhausern, Skillman, NJ (US);

Inventor:

Frederic Zenhausern, Skillman, NJ (US);

Assignee:

Alpha MOS, Toulouse, FR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N027/00 ;
U.S. Cl.
CPC ...
Abstract

A method and apparatus suitable for monitoring the quality and/or performance of a processing aid or a component during manufacture, storage, or use of electronics or electronic assemblies is provided. The apparatus incorporates a sampling device, a multivariate sensing system (e.g., a multi-sensor array or at least one sensor capable of measuring multiple variables) capable to process an analysis of low vapor pressure or vaporizable constituents in electronics by detecting some changes in the physico-chemical properties of the sensor and/or electronics and applying multivariate analysis. In one embodiment, the sensing system comprises an array of metal oxide sensors and a multivariate analysis algorithm for data processing. This method and apparatus can be employed for various quality control purposes such as contamination analysis or failure analysis of integrated circuits components.


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