The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2005
Filed:
Nov. 04, 2003
Yumiko Ohsaki, Tochigi, JP;
Toshihiro Sunaga, Tochigi, JP;
Koshi Hatakeyama, Tochigi, JP;
Takahiro Sasaki, Tochigi, JP;
Yumiko Ohsaki, Tochigi, JP;
Toshihiro Sunaga, Tochigi, JP;
Koshi Hatakeyama, Tochigi, JP;
Takahiro Sasaki, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A six-mirror catoptric projection optical system for projecting a reduced size of a pattern on an object onto an image plane includes first, second, third, fourth, fifth, and sixth mirrors from the image plane along an optical path, wherein the third and fourth mirrors are located between the fifth mirror and sixth mirror and wherein the catoptric projection optical system forms an intermediate image along the optical path from the third mirror to the fifth mirror.