The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2005
Filed:
Apr. 22, 2005
Ryuichi Kurosawa, Okaya, JP;
Ryuichi Kurosawa, Okaya, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side operating region integrally formed with the mirror and provided at a different position from the mirror; and at least one second mirror-side operating region provided at an end portion of the mirror, and a glass substrate includes: an opposite-side operating section, a coulomb force acting between the first mirror-side operating region and the opposite-side operating section; and another opposite-side operating section, the coulomb force acting between the second mirror-side operating region and the other opposite-side operating section. The glass substrate is formed so that a gap between the first mirror-side operating region and the opposite-side operating section is narrower than a gap between the second mirror-side operating region and the opposite-side operating section.