The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2005
Filed:
May. 28, 2004
Holger Claus, Lake Forest, CA (US);
Zoran Falkenstein, Rancho St. Margarita, CA (US);
Holger Claus, Lake Forest, CA (US);
Zoran Falkenstein, Rancho St. Margarita, CA (US);
Ushio America, Inc., Irvine, CA (US);
Abstract
A non-oxidizing electrode arrangement for an excimer lamp that is formed by coating an electrode of the lamp with a layer of protective layer that prevents the electrode from oxidizing. The protective layer is preferably transparent and possesses a low permeability for oxygen (e.g., silicon oxide, magnesium fluoride, calcium fluoride). The interior of the excimer lamp is evacuated to a pressure level that is lower than the pressure level surrounding the excimer lamp at any time during the non-oxidizing electrode formation process in order to assist in preventing the excimer lamp from fracturing.